Department of Chemical Engineering, Stanford University, Stanford, California 94305, USA.
ACS Nano. 2009 Nov 24;3(11):3543-51. doi: 10.1021/nn900984w.
This paper discusses a method for the direct patterning of Au electrodes at nanoscale resolution using dip-pen nanolithography, with proof-of-concept demonstrated by creating single-walled carbon nanotube devices. This technique enables insight into three key concepts at the nanoscale: using dip-pen nanolithography as an alternative to electron-beam lithography for writing contacts to carbon nanotubes, understanding the integrity of contacts and devices patterned with this technique, and on a more fundamental level, providing a facile method to compare and understand electrical and Raman spectroscopy data from the same isolated carbon nanotube. Electrical contacts to individual and small bundle single-walled carbon nanotubes were masked by an alkylthiol that was deposited via dip-pen nanolithography on a thin film of Au evaporated onto spin-cast, nonpercolating, and highly isolated single-walled carbon nanotubes. A wet Au etching step was used to form the individual devices. The electrical characteristics for three different single-walled carbon nanotube devices are reported: semimetallic, semiconducting, and metallic. Raman analysis on representative devices corroborates the results from AFM imaging and electrical testing. This work demonstrates a technique for making electrical contact to nanostructures of interest and provides a platform for directly corroborating electrical and optical measurements. The merits of using dip-pen nanolithography include flexible device configuration (such as varying the channel length and the number, size, and orientation of contacts), targeted patterning of individual devices with imaging and writing conducted in the same instrument under ambient conditions, and negligible damage to single-walled carbon nanotubes during the fabrication process.
本文讨论了一种使用蘸笔纳米光刻术在纳米尺度直接对 Au 电极进行图案化的方法,并通过创建单壁碳纳米管器件证明了这一概念。该技术使我们能够深入了解纳米尺度上的三个关键概念:使用蘸笔纳米光刻术替代电子束光刻来书写碳纳米管的接触点,理解使用该技术图案化的接触点和器件的完整性,以及在更基本的层面上,提供一种简便的方法来比较和理解来自同一孤立碳纳米管的电学和拉曼光谱数据。通过蘸笔纳米光刻术将烷基硫醇沉积在蒸发到旋涂的、非渗滤的和高度孤立的单壁碳纳米管上的薄膜上,从而对单个和小束单壁碳纳米管的电接触进行了掩蔽。使用湿 Au 刻蚀步骤形成单个器件。报道了三种不同单壁碳纳米管器件的电特性:半金属、半导体和金属。对代表性器件的拉曼分析证实了 AFM 成像和电测试的结果。这项工作展示了一种对感兴趣的纳米结构进行电接触的技术,并提供了一个直接证实电和光学测量的平台。使用蘸笔纳米光刻术的优点包括灵活的器件配置(例如,改变沟道长度以及接触点的数量、大小和方向)、在相同仪器下在环境条件下进行成像和书写以对单个器件进行有针对性的图案化,以及在制造过程中对单壁碳纳米管的损伤可忽略不计。