互补金属氧化物半导体兼容的聚对二甲苯-C 覆盖纳米通道的制造和特性，以及集成纳米电极。
Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes.
出版信息
Biomicrofluidics. 2009 Aug 18;3(3):31101. doi: 10.1063/1.3212074.
Nanochannels offer a way to align and analyze long biopolymer molecules such as DNA with high precision at potentially single basepair resolution, especially if a means to detect biomolecules in nanochannels electronically can be developed. Integration of nanochannels with electronics will require the development of nanochannel fabrication procedures that will not damage sensitive electronics previously constructed on the device. We present here a near-room-temperature fabrication technology involving parylene-C conformal deposition that is compatible with complementary metal oxide semiconductor electronic devices and present an analysis of the initial impedance measurements of conformally parylene-C coated nanochannels with integrated gold nanoelectrodes.
纳米通道为长生物聚合物分子（如 DNA）的高精度对准和分析提供了一种方法，其分辨率有可能达到单个碱基对，特别是如果能够开发出在纳米通道中电子检测生物分子的方法。纳米通道与电子设备的集成需要开发纳米通道制造工艺，而该工艺不会损坏先前在设备上构建的敏感电子设备。我们在这里提出了一种涉及聚对二甲苯-C 共形沉积的近室温制造技术，该技术与互补金属氧化物半导体电子设备兼容，并分析了具有集成金纳米电极的共形聚对二甲苯-C 涂层纳米通道的初始阻抗测量结果。
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