CNR-IDASC Sensor Lab and Department of Physics and Chemistry for Engineering and Materials, Brescia University, via Valotti 9, Brescia, Italy.
Nanotechnology. 2010 Apr 9;21(14):145502. doi: 10.1088/0957-4484/21/14/145502. Epub 2010 Mar 11.
A simple and large-area scalable methodology has been set up for direct integration of metal oxide nanowire bundles into a functional device for gas sensing. It is based on sequential application of two consolidated techniques, namely high temperature vapour transport and condensation for fabrication of metal oxide nanowires, and wet etching of a sacrificial layer. The alumina substrate patterned with a silicon dioxide sacrificial layer does not influence the growth of nanowires and remains unaltered under the high temperature process. The sacrificial layer is finally removed under hydrofluoric acid, the metal oxide nanowires do not suffer modifications and a clean substrate surface can be obtained for deposition of stable metal contacts. The methodology was proven effective for application in a gas sensor device. Electrical measurements indicate that a slightly rectifying Schottky junction is present at low temperatures (up to T = 150 degrees C) between nanowires and platinum electrodes, which vanishes as the temperature increases and under high voltage (bias voltage above approximately 3 V). The results foresee the possibility of growth and integration of nanowire bundles directly into devices, overcoming the need for expensive and time-consuming nanomanipulation techniques.
已经建立了一种简单且适用于大面积的可扩展方法,用于将金属氧化物纳米线束直接集成到气体感应功能器件中。该方法基于两种成熟技术的顺序应用,即高温气相传输和冷凝来制备金属氧化物纳米线,以及牺牲层的湿法刻蚀。在涂覆有二氧化硅牺牲层的氧化铝衬底上,纳米线的生长不会受到影响,并且在高温过程中保持不变。最后,在氢氟酸中去除牺牲层,金属氧化物纳米线不会发生变化,并且可以获得清洁的衬底表面,以便沉积稳定的金属接触。该方法已被证明可有效应用于气体传感器器件。电测量表明,在低温(低至 T=150°C)下,纳米线和铂电极之间存在略微整流的肖特基结,随着温度升高和高电压(偏置电压高于约 3V)的施加,该结会消失。这些结果预示着纳米线束可以直接生长和集成到器件中,从而克服了昂贵且耗时的纳米操作技术的需求。