Bennett J M, Dancy J H
Appl Opt. 1981 May 15;20(10):1785-802. doi: 10.1364/AO.20.001785.
A surface profiling instrument is described which produces digitized surface profiles and other statistical data. Sharp styli are available that can give height resolution of the order of 1-2 A and lateral resolution of a few tenths of a micrometer on smooth surfaces. The stylus loading can be adjusted so that no permanent marks are left on the surface. Representative surface profiles and autocovariance functions are shown for various materials, and roughnesses measured with the instrument are compared with values obtained using other techniques.
本文描述了一种表面轮廓测量仪，它能生成数字化的表面轮廓和其他统计数据。有尖锐的触针可供使用，在光滑表面上可实现约1 - 2埃的高度分辨率和几十分之一微米的横向分辨率。触针加载力可以调节，从而不会在表面留下永久性痕迹。文中展示了各种材料的代表性表面轮廓和自协方差函数，并将该仪器测量的粗糙度与使用其他技术获得的值进行了比较。
