Baek Kwang Hyun, Kim Jung Hoon, Lee Kil Bok, Ahnn Hyung Soo, Yoon Chong Seung
Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea.
J Nanosci Nanotechnol. 2010 May;10(5):3118-22. doi: 10.1166/jnn.2010.2176.
It was demonstrated that size of the Ag nanoparticles array fabricated by nanosphere lithography (NSL) can be changed as needed by reactive ion etching (RIE) of the self-assembled polystyrene (PS) nanosphere template and post-annealing of the Ag particle array. A macroscopic 2D array of ordered Ag nanoparticles stretching over an area greater than 1 cm2 was achieved using a modified nanosphere lithography method. The wavelength corresponding to the extinction maximum of the surface plasmon resonance (SPR) from the Ag nanoparticle array was systematically tuned by RIE of the PS template. Additional tuning of SPR was achieved by post-annealing the Ag nanoparticles which induced shape-changes in the Ag nanoparticles. We demonstrated that SPR can be tuned over the entire visible spectrum by RIE of the PS mask and thermal annealing, which can be potentially used to display localized SPR spectrum (hence, different color) throughout the visible range.
结果表明，通过对自组装聚苯乙烯（PS）纳米球模板进行反应离子刻蚀（RIE）以及对银粒子阵列进行后退火处理，可根据需要改变通过纳米球光刻（NSL）制备的银纳米粒子阵列的尺寸。使用改进的纳米球光刻方法实现了在面积大于1平方厘米的区域上延伸的宏观二维有序银纳米粒子阵列。通过对PS模板进行RIE系统地调节了来自银纳米粒子阵列的表面等离子体共振（SPR）消光最大值对应的波长。通过对银纳米粒子进行后退火处理实现了SPR的额外调节，这会导致银纳米粒子的形状发生变化。我们证明，通过对PS掩膜进行RIE和热退火，可以在整个可见光谱范围内调节SPR，这有可能用于在整个可见范围内显示局部SPR光谱（从而呈现不同颜色）。
