High-speed deformable mirror system.

A phase correction device has been developed for a high-power cw 10.6-microm laser beam using a water-cooled piezoelectric actuated deformable mirror system. It is the first HEL deformable mirror designed to provide dynamic high-speed wave front correction while simultaneously providing high-frequency phase modulation at any or all of its fifty-two actuator locations. The high voltage amplifiers energizing the deformable mirror can be simultaneously driven at +/-500 V from 0 to 100 Hz and at +/-50 V from 0 to 2500 Hz about a 500-V bias level. At these drive levels, the controllable surface is capable of assuming nonplanar contours having maximum deformation of +/-20 microm, with maximum dither capabilities of +/-1 microm at each actuator site and maximum surface gradients of 12 microm/cm, The performance, major features, and design considerations of the mirror and electronics are described.