用于天文学和激光加工应用的可扩展堆叠阵列压电变形镜。

Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications.

作者信息

Wlodarczyk Krystian L, Bryce Emma, Schwartz Noah, Strachan Mel, Hutson David, Maier Robert R J, Atkinson David, Beard Steven, Baillie Tom, Parr-Burman Phil, Kirk Katherine, Hand Duncan P

机构信息

Institute of Photonics and Quantum Sciences, Heriot-Watt University, Edinburgh EH14 4AS, United Kingdom.

School of Engineering and Science, University of the West of Scotland, Paisley PA1 2BE, United Kingdom.

出版信息

Rev Sci Instrum. 2014 Feb;85(2):024502. doi: 10.1063/1.4865125.

DOI:10.1063/1.4865125

PMID:24593375

Abstract

A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.

摘要

本文介绍了一种具有35个有源元件的可扩展且可能低成本的堆叠阵列压电变形镜（SA-PDM）原型。该原型的特点是最大致动器行程为2μm，镜面下垂为1.4μm（在未通电的SA-PDM的14mm×14mm区域测量），滞后误差为±200nm。此处描述的初步概念验证实验表明，该镜子可成功用于整形高功率激光束，以提高激光加工性能。使用SA-PDM获得了各种光束形状，并展示了使用整形光束进行激光加工的示例。