Ejima Takeo, Ishida Fumihiko, Murata Hiromichi, Toyoda Mitsunori, Harada Tetsuo, Tsuru Toshihide, Hatano Tadashi, Yanagihara Mihiro, Yamamoto Masaki, Mizutani Haruo
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai, 980-8577, Japan.
Opt Express. 2010 Mar 29;18(7):7203-9. doi: 10.1364/OE.18.007203.
We present and demonstrate the use of an extreme ultraviolet (EUV) microscope that was developed in-house. Images are acquired using Bragg reflection multilayer optics and a laser-produced plasma light source. The upper-limit spatial resolution of the EUV microscope is 130 nm with a 10 ns exposure time and 250 x 250 microm(2) field of view. Resolution is superior to that of visible microscopes with the same size of field of view, and the exposure time is short enough to observe fine structures in-vivo. Observation of the cerebral cortex of a mouse is demonstrated.
我们展示并演示了一种自行研发的极紫外(EUV)显微镜的使用。使用布拉格反射多层光学器件和激光产生的等离子体光源采集图像。该EUV显微镜在10纳秒曝光时间和250×250微米²视场下的空间分辨率上限为130纳米。其分辨率优于相同视场大小的可见光显微镜,并且曝光时间足够短,能够在体内观察精细结构。文中展示了对小鼠大脑皮层的观察。