真空紫外薄膜。1：氟化钡（BaF₂）、氟化钙（CaF₂）、氟化镧（LaF₃）、氟化镁（MgF₂）、氧化铝（Al₂O₃）、氧化铪（HfO₂）和二氧化硅（SiO₂）薄膜的光学常数。

Vacuum ultraviolet thin films. 1: Optical constants of BaF(2), CaF(2), LaF(3), MgF(2), Al(2)O(3), HfO(2), and SiO(2) thin films.

作者信息

Zukic M, Torr D G, Spann J F, Torr M R

出版信息

Appl Opt. 1990 Oct 1;29(28):4284-92. doi: 10.1364/AO.29.004284.

DOI:10.1364/AO.29.004284

PMID:20577378

Abstract

The optical constants of MgF(2) (bulk) and BaF(2), CaF(2), LaF(3), MgF(2), Al(2)O(3), HfO(2), and SiO(2) films deposited on MgF(2) substrates are determined from photometric measurements through an iteration process of matching calculated and measured values of the reflectance and transmittance in the 120-230-nm vacuum ultraviolet wavelength region. The potential use of the listed fluorides and oxides as vacuum ultraviolet coating materials is discussed in part 2 of this paper.

摘要

通过在120 - 230纳米真空紫外波长区域内，对计算得到的反射率和透射率与测量值进行匹配的迭代过程，从光度测量中确定了MgF₂（块状）以及沉积在MgF₂衬底上的BaF₂、CaF₂、LaF₃、MgF₂、Al₂O₃、HfO₂和SiO₂薄膜的光学常数。本文第二部分讨论了所列氟化物和氧化物作为真空紫外涂层材料的潜在用途。