Cavendish Laboratory Department of Physics University of Cambridge J. J. Thomson Avenue, Cambridge CB3 0HE, UK.
Small. 2010 Jun 6;6(11):1248-54. doi: 10.1002/smll.201000060.
This study explores a number of low-viscosity glass-forming polymers for their suitability as high-speed materials in electrohydrodynamic (EHD) lithography. The use of low-viscosity polymer films significantly reduces the patterning time (to below 10 s) compared to earlier approaches, without compromising the high fidelity of the replicated structures. The rapid pace of this process requires a method to monitor the completion of EHD pattern formation. To this end, the leakage current across the device is monitored and the sigmoidal shape of the current curve is correlated with the various stages of EHD pattern formation.
本研究探索了多种低粘度玻璃形成聚合物，以评估其在电动力学（EHD）光刻中作为高速材料的适用性。与早期方法相比，使用低粘度聚合物薄膜可将图案化时间（降至 10 秒以下）显著缩短，同时又不影响复制结构的高保真度。由于该过程速度很快，因此需要一种方法来监测 EHD 图案形成的完成情况。为此，监测了器件的漏电流，并且电流曲线的 S 形与 EHD 图案形成的各个阶段相关联。
