Fan Y Y, Huynh V M
Appl Opt. 1993 Jul 1;32(19):3452-8. doi: 10.1364/AO.32.003452.
Light scattering from rough cylindrical surfaces at near-zero grazing angle is investigated by applying Beckmann's scalar scattering model to the surface's tangential planes and superimposing the individual intensities to form the scattering pattern. A solution for sinusoidal surface-roughness profiles is derived and numerical results are obtained to study the influences of surface wavelength and amplitude on the far-field scattering pattern. The spatial and intensity distributions of the fringe (across and along thefringe) are found to be related to the surface wavelength and amplitude, respectively. Scattering intensity-distribution measurements are carried out on turned surfaces, and the results obtained are in agreement with the model's prediction. As a direct application, a technique to estimate the surface broughness of turned surfaces is proposed. This technique offers an absolute measurement in which the roughness amplitude and wavelength of the surface are defined relative to the illumination wavel gth.
通过将贝克曼标量散射模型应用于粗糙圆柱表面的切平面,并叠加各个强度以形成散射图案,研究了近零掠射角下粗糙圆柱表面的光散射。推导了正弦表面粗糙度轮廓的解,并获得了数值结果,以研究表面波长和振幅对远场散射图案的影响。发现条纹的空间和强度分布(跨条纹和沿条纹)分别与表面波长和振幅有关。在车削表面上进行了散射强度分布测量,所得结果与模型预测一致。作为直接应用,提出了一种估计车削表面粗糙度的技术。该技术提供了一种绝对测量方法,其中表面的粗糙度振幅和波长是相对于照明波长定义的。