3D Optical Metrology Laboratory, Department of Photonic Engineering, Chosun University, 309 Pilmun-daero, Dong-gu, Gwangju 61452, Korea.
Sensors (Basel). 2019 Nov 21;19(23):5094. doi: 10.3390/s19235094.
In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry.
在这项研究中，我们提出了一种有效的方法，可以通过单次成像来测量具有三维表面轮廓的样本。基于双波长干涉原理和使用偏振像素相机的空间相移技术，该系统不仅可以快速测量相位，还可以克服典型相移干涉测量中的 2π 模糊问题。粗糙表面轮廓可以通过干涉条纹的可见度来计算，并可以通过在精细高度图中发生的相位跃变来补偿高度不连续性。一个倾斜平面反射镜和一个具有 9μm 的台阶高度样本被用于验证连续平滑表面和大台阶高度的测量能力。测量结果与典型的双波长干涉测量结果吻合较好。
