Information and Quantum Systems Laboratory, Hewlett-Packard Laboratories, Palo Alto, CA 94304, USA.
Nanotechnology. 2010 Jun 25;21(25):255502. doi: 10.1088/0957-4484/21/25/255502. Epub 2010 May 28.
We demonstrated a cost-effective and deterministic method of patterning 3D cone arrays over a large area by using nanoimprint lithography (NIL). Cones with tip radius of less than 10 nm were successfully duplicated onto the UV-curable imprint resist materials from the silicon cone templates. Such cone structures were shown to be a versatile platform for developing reliable, highly sensitive surface enhanced Raman spectroscopy (SERS) substrates. In contrast to the silicon nanocones, the SERS substrates based on the Au coated cones made by the NIL offered significant improvement of the SERS signal. A further improvement of the SERS signal was observed when the polymer cones were imprinted onto a reflective metallic mirror surface. A sub-zeptomole detection sensitivity for a model molecule, trans-1,2-bis(4-pyridyl)-ethylene (BPE), on the Au coated NIL cone surfaces was achieved.
我们展示了一种经济高效且确定的方法，通过纳米压印光刻（NIL）在大面积上形成 3D 锥形阵列。成功地将尖端半径小于 10nm 的锥形从硅锥形模板复制到紫外光可固化的压印光刻胶材料上。这种锥形结构被证明是开发可靠、高灵敏度表面增强拉曼光谱（SERS）衬底的多功能平台。与硅纳米锥相比，基于 NIL 制造的 Au 涂层锥形的 SERS 衬底显著提高了 SERS 信号。当将聚合物锥形压印到反射金属镜表面上时，观察到 SERS 信号进一步提高。在 Au 涂层 NIL 锥形表面上，对于模型分子反式-1,2-双（4-吡啶基）-乙烯（BPE），实现了亚zeptomole 的检测灵敏度。
