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飞秒激光微纳加工对微流控器件的修饰及其在芯片功能化中的应用。

Embellishment of microfluidic devices via femtosecond laser micronanofabrication for chip functionalization.

机构信息

State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun, 130012, China.

出版信息

Lab Chip. 2010 Aug 7;10(15):1993-6. doi: 10.1039/c003264f. Epub 2010 May 27.

Abstract

This paper demonstrates the embellishment of existing microfluidic devices with integrated three dimensional (3D) micronanostructures via femtosecond laser micronanofabrication, which, for the first time, proves two-photon photopolymerization (TPP) to be a powerful technology for chip functionalization. As representative examples, microsieves with various pore shape and adjustable pore size were successfully fabricated inside a conventional glass-based microfluidic channel prepared by wet etching for microparticle separation. Moreover, a fish scale like microfilter was also fabricated and appointed as a one-way valve, which showed excellent performance as we expected. These results indicate that such embellishment of microfluidic devices is simple, low cost, flexible and easy to access. We believe that, combined with TPP, the application of lab-on-chip devices would be further extended.

摘要

本文通过飞秒激光微纳加工,在现有的微流控设备上进行集成三维(3D)微纳结构的修饰,首次证明双光子光聚合(TPP)是一种用于芯片功能化的强大技术。作为代表性示例,成功地在通过湿法刻蚀制备的常规玻璃基微流控通道内制造了具有各种孔形状和可调节孔径的微筛,用于微粒子分离。此外,还制造了鱼鳞状的微滤器,并将其指定为单向阀,其性能如预期的那样出色。这些结果表明,这种微流控设备的修饰简单、成本低、灵活且易于实现。我们相信,结合 TPP,微流控器件的应用将得到进一步扩展。

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