Wu Dong, Chen Qi-Dai, Niu Li-Gang, Wang Jian-Nan, Wang Juan, Wang Rui, Xia Hong, Sun Hong-Bo
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun, 130023, China.
Lab Chip. 2009 Aug 21;9(16):2391-4. doi: 10.1039/b902159k. Epub 2009 Jun 1.
Microfluidic researches are now resorting to advanced micro-nanoprocessing technologies for production of more functional "lab-on-a-chip" systems. However, two-photon polymerization (TPP), a powerful designable micro-nanofabrication approach, has not been put to use on the exciting field, largely due to the difficulties in forming buried channels. Here, we solve the problem by TPP prototyping of nanoshells, for which the usage of the negative tone resin SU-8 is found critical. The fabrication efficiency improved by orders of magnitude, together with the prospect of integration of movable micro-mechanical and optical components into the chip would make TPP a promising enabling tool for the micro-analytical systems. Finally, a 25 microm length functional microvalve in a microfluidic channel was rapidly realized and its "ON" and "OFF" states were tested.
微流控研究目前正借助先进的微纳加工技术来生产功能更强大的“芯片实验室”系统。然而，双光子聚合（TPP）作为一种强大的可设计微纳制造方法，尚未在这一令人兴奋的领域得到应用，这主要是由于形成埋入通道存在困难。在此，我们通过纳米壳的TPP原型制作解决了这个问题，发现使用负性光刻胶SU - 8至关重要。制造效率提高了几个数量级，再加上将可移动微机械和光学组件集成到芯片中的前景，将使TPP成为微分析系统一种很有前景的赋能工具。最后，在微流控通道中快速实现了一个25微米长的功能微阀，并测试了其“开”和“关”状态。
