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通过旋转起偏器和检偏器的扫描椭偏仪。

Scanning ellipsometer by rotating polarizer and analyzer.

作者信息

Chen L Y, Lynch D W

出版信息

Appl Opt. 1987 Dec 15;26(24):5221-8. doi: 10.1364/AO.26.005221.

Abstract

A new type of scanning photometric ellipsometer with polarizer and analyzer both rotating synchronously at rotation rates of omega(0)/2 and omega(0) (f(0) = 51 Hz), has been designed and constructed. The mechanical and electrical design, alignment, calibration, and error reduction of the system are discussed in detail. Through measuring the amplitudes of the three ac components from the photomultiplier, at frequencies of 51, 102, and 153 Hz, respectively, complex dielectric function spectra have been obtained for test samples of Au and CdTe in the 1.5-5.5-eV range and shown to be in agreement with the results of others.

摘要

一种新型扫描光度椭圆偏振仪已被设计并制造出来,其偏振器和分析器均以ω(0)/2和ω(0)(f(0)=51Hz)的旋转速率同步旋转。详细讨论了该系统的机械和电气设计、校准以及误差减小。通过分别测量来自光电倍增管的频率为51Hz、102Hz和153Hz的三个交流分量的幅度,获得了金和碲化镉测试样品在1.5 - 5.5eV范围内的复介电函数谱,且结果与其他研究结果一致。

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