Kubo M, Hanabusa M
Appl Opt. 1990 Jun 20;29(18):2755-9. doi: 10.1364/AO.29.002755.
A new laser-based method was developed for fabrication of microlenses on flat quartz plates. In this method, a CO(2) laser is used to heat a quartz surface and induce thermal reactions for source gases of SiH(4) and NO. Even as-grown silicon oxide deposits have the spherical thickness distribution required for a lens at the center and this useful area can be further increased by wet etching. Microlenses were checked on a Fizeau interferometer for surface accuracy and aberrations. As a demonstration, a 14-microm thick microlens was used for collimating light from an optical fiber.
一种基于激光的新方法被开发用于在平面石英板上制造微透镜。在这种方法中，使用二氧化碳激光加热石英表面，并引发硅烷（SiH₄）和一氧化氮（NO）源气体的热反应。即使是生长态的氧化硅沉积物在中心处也具有透镜所需的球形厚度分布，并且这个有用区域可以通过湿法蚀刻进一步扩大。在斐索干涉仪上检查微透镜的表面精度和像差。作为演示，一个14微米厚的微透镜被用于准直来自光纤的光。
