Suda H, Hanabusa M
Appl Opt. 1992 Sep 1;31(25):5388-90. doi: 10.1364/AO.31.005388.
Three-dimensional microlenses were fabricated on a quartz substrate by evaporating a quartz target with a focused CO(2) laser beam. The size and shape of the deposit were determined primarily by a mask placed in front of the substrate. The spherical thickness profile required for a lens was obtained by adjusting the gas pressure in the cell. The lens was typically 0.25 mm in diameter with a focal length of 8 mm. The present method is particularly suited for fabrication of microlens arrays, and as a demonstration a 3 x 5 array was produced.
通过用聚焦的二氧化碳激光束蒸发石英靶材，在石英衬底上制备了三维微透镜。沉积物的尺寸和形状主要由放置在衬底前面的掩膜决定。通过调节池中的气压获得透镜所需的球形厚度分布。该透镜的直径通常为0.25毫米，焦距为8毫米。本方法特别适用于微透镜阵列的制造，作为演示，制作了一个3×5的阵列。
