Lee B S, Strand T C
Appl Opt. 1990 Sep 10;29(26):3784-8. doi: 10.1364/AO.29.003784.
Coherence scanning microscopy is a new technique in high resolution imaging. It shares many of the features of confocal microscopy but uses coherence effects to enhance the lateral and longitudinal resolution rather than physical apertures. This approach has two significant implications for profilometry: the longitudinal resolution is decoupled from the lateral resolution, and interference effects can be used to further enhance the longitudinal resolution. We detail the features of coherence scanning profilometry and give some examples.
相干扫描显微镜是一种高分辨率成像的新技术。它具有共聚焦显微镜的许多特性，但利用相干效应来提高横向和纵向分辨率，而非物理孔径。这种方法对轮廓测量有两个重要意义：纵向分辨率与横向分辨率解耦，并且干涉效应可用于进一步提高纵向分辨率。我们详细介绍了相干扫描轮廓测量法的特性并给出了一些示例。
