XUV optical constants of single-crystal GaAs and sputtered C, Si, Cr(3)C(2), Mo, and W.

The optical constants for sputtered films of C, Si, Mo, and W are presented for photon wavelengths from 13.3 to 304 A, and for single-crystal GaAs and sputtered Cr(3)C(2) from 13.3 to 1302 A. The best-fit values of the optical constants, and also the surface roughness parameter sigma, are obtained from reflectance vs incidence angle measurements using a nonlinear, least-squares curve fitting algorithm. These optical constants are significantly different from previously reported data in portions of this spectral region. The new optical data result in good agreement between theory and reflectance measurements of soft x-ray multilayer coatings made from the sputtered materials.