相似文献
1
E-beam lithography for micro-nanofabrication.
Biomicrofluidics. 2010 Jun 15;4(2):026503. doi: 10.1063/1.3437589.
2
Solvent-Free Nanofabrication Based on Ice-Assisted Electron-Beam Lithography.
Nano Lett. 2020 Dec 9;20(12):8841-8846. doi: 10.1021/acs.nanolett.0c03809. Epub 2020 Nov 13.
3
3D Nanoprinting by Electron-Beam with an Ice Resist.
ACS Appl Mater Interfaces. 2022 Jan 12;14(1):1652-1658. doi: 10.1021/acsami.1c18356. Epub 2021 Dec 22.
4
Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale.
Nano Lett. 2017 Aug 9;17(8):4562-4567. doi: 10.1021/acs.nanolett.7b00514. Epub 2017 Apr 26.
5
Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art.
Nanotechnology. 2009 Jul 22;20(29):292001. doi: 10.1088/0957-4484/20/29/292001. Epub 2009 Jul 1.
6
Ice lithography for 3D nanofabrication.
Sci Bull (Beijing). 2019 Jun 30;64(12):865-871. doi: 10.1016/j.scib.2019.06.001. Epub 2019 Jun 3.
7
Direct visualization of beam-resist interaction volume for sub-nanometer helium ion beam-lithography.
Nanotechnology. 2021 Jul 22;32(41). doi: 10.1088/1361-6528/ac1099.
8
High speed e-beam writing for large area photonic nanostructures - a choice of parameters.
Sci Rep. 2016 Sep 16;6:32945. doi: 10.1038/srep32945.
9
Lithography Technology for Micro- and Nanofabrication.
Adv Exp Med Biol. 2021;1309:217-233. doi: 10.1007/978-981-33-6158-4_9.
10
In Situ Study of the Impact of Aberration-Corrected Electron-Beam Lithography on the Electronic Transport of Suspended Graphene Devices.
Nanomaterials (Basel). 2020 Apr 2;10(4):666. doi: 10.3390/nano10040666.
引用本文的文献
1
Direct chemical lithography writing on 2D materials by electron beam induced chemical reactions.
Nanoscale Adv. 2025 Feb 10;7(7):2021-2031. doi: 10.1039/d5na00036j. eCollection 2025 Mar 25.
2
2D wrinkle assisted zigzag plasmonic chains for isotropic SERS enhancement.
Sci Rep. 2025 Jan 29;15(1):3662. doi: 10.1038/s41598-025-87504-8.
3
Reusable SERS Platform of Femtosecond Laser Processed Substrate for Detection of Malachite Green.
Molecules. 2024 Oct 26;29(21):5053. doi: 10.3390/molecules29215053.
4
In-situ observation of silk nanofibril assembly via graphene plasmonic infrared sensor.
Nat Commun. 2024 May 31;15(1):4643. doi: 10.1038/s41467-024-49076-5.
5
3D and 4D assembly of functional structures using shape-morphing materials for biological applications.
Front Bioeng Biotechnol. 2024 Mar 28;12:1347666. doi: 10.3389/fbioe.2024.1347666. eCollection 2024.
6
Nanotheranostics: The Fabrication of Theranostics with Nanoparticles and their Application to Treat the Neurological Disorders.
Recent Pat Nanotechnol. 2025;19(1):17-34. doi: 10.2174/1872210517666230718115651.
7
Microfluidics based bioimaging with cost-efficient fabrication of multi-level micrometer-sized trenches.
Biomicrofluidics. 2023 Jun 15;17(3):034103. doi: 10.1063/5.0151868. eCollection 2023 May.
8
Recent Advances of Enzyme-Free Electrochemical Sensors for Flexible Electronics in the Detection of Organophosphorus Compounds: A Review.
Sensors (Basel). 2023 Jan 20;23(3):1226. doi: 10.3390/s23031226.
9
Gap-directed chemical lift-off lithographic nanoarchitectonics for arbitrary sub-micrometer patterning.
Beilstein J Nanotechnol. 2023 Jan 4;14:34-44. doi: 10.3762/bjnano.14.4. eCollection 2023.
10
Patterning of Silicon Substrate with Self-Assembled Monolayers Using Vertically Aligned Carbon Nanotube Electron Sources.
Nanomaterials (Basel). 2022 Dec 11;12(24):4420. doi: 10.3390/nano12244420.
Zotero 插件