Department of Biomedical Engineering, The Ohio State University, Columbus, OH 43210, USA.
Biomed Microdevices. 2010 Dec;12(6):1009-17. doi: 10.1007/s10544-010-9455-9.
Polyvinylidene fluoride (PVDF) microstructures are of interest for a number of BioMEMS applications both for their piezoelectric and biocompatible properties. In this work, simple soft lithography-based techniques were developed to fabricate PVDF microstructures with diverse geometries, including microarrays of pillars, lines, and wells. Four different microstructure configurations were created: freestanding, stamped discontinuous, stamped continuous and imprinted patterns. Features with lateral dimensions down to 1 μm were consistently reproduced on 2.5 cm diameter areas. Atomic force microscopy (AFM) measurements of poled PVDF microstructures confirmed a marked inverse piezoelectric behavior. The techniques presented here have a number of advantages over previously demonstrated PVDF micropatterning approaches.
聚偏二氟乙烯（PVDF）微结构因其压电和生物相容性而引起了许多生物微机电系统（BioMEMS）应用的关注。在这项工作中，开发了简单的基于软光刻的技术来制造具有不同几何形状的 PVDF 微结构，包括柱子、线条和井的微阵列。创建了四种不同的微结构配置：自由站立、冲压不连续、冲压连续和压印图案。在 2.5 厘米直径的区域上一致地复制了具有低至 1 μm 横向尺寸的特征。极化 PVDF 微结构的原子力显微镜（AFM）测量证实了显著的逆压电行为。与之前展示的 PVDF 微图案化方法相比，这里提出的技术具有许多优势。
