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胶态自组装与纳米制造相遇:从二维胶体晶体到纳米结构阵列。

Colloidal self-assembly meets nanofabrication: from two-dimensional colloidal crystals to nanostructure arrays.

机构信息

State Key Lab of Supramolecular Structure and Materials, College of Chemistry, Jilin University, Changchun, 130012, P. R. China.

出版信息

Adv Mater. 2010 Oct 8;22(38):4249-69. doi: 10.1002/adma.201000755.

Abstract

Self-assembly of colloidal microspheres or nanospheres is an effective strategy for fabrication of ordered nanostructures. By combination of colloidal self-assembly with nanofabrication techniques, two-dimensional (2D) colloidal crystals have been employed as masks or templates for evaporation, deposition, etching, and imprinting, etc. These methods are defined as "colloidal lithography", which is now recognized as a facile, inexpensive, and repeatable nanofabrication technique. This paper presents an overview of 2D colloidal crystals and nanostructure arrays fabricated by colloidal lithography. First, different methods for fabricating self-assembled 2D colloidal crystals and complex 2D colloidal crystal structures are summarized. After that, according to the nanofabrication strategy employed in colloidal lithography, related works are reviewed as colloidal-crystal-assisted evaporation, deposition, etching, imprinting, and dewetting, respectively.

摘要

胶体微球或纳米球的自组装是制备有序纳米结构的有效策略。通过将胶体自组装与纳米制造技术相结合,二维(2D)胶体晶体已被用作蒸发、沉积、刻蚀和压印等的掩模或模板。这些方法被定义为“胶体光刻”,现在被认为是一种简便、廉价且可重复的纳米制造技术。本文综述了通过胶体光刻制备的 2D 胶体晶体和纳米结构阵列。首先,总结了制备自组装 2D 胶体晶体和复杂 2D 胶体晶体结构的不同方法。然后,根据胶体光刻中采用的纳米制造策略,分别综述了胶体晶体辅助蒸发、沉积、刻蚀、压印和去湿等相关工作。

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