Ai C, Wyant J C
Appl Opt. 1993 Jul 1;32(19):3470-8. doi: 10.1364/AO.32.003470.
Phase errors in a Fizeau phase-shifting interferometer caused by multiple-reflected beams from a retroreflective optics, such as a corner cube and a right-angle prism, are studied. Single- and double-pass configurations are presented, and their measurement results are compared. An attenuator is not needed in a double-pass configuration because light is reflected by the retroreflective optics twice and the reference surface once and hence the intensities match. It is more accurate to test a corner cube or a right-angle prism in a double-pass configuration than in a single-pass configuration. Simulations and experimental results are presented.
研究了由角锥棱镜和直角棱镜等后向反射光学元件的多次反射光束在斐索相移干涉仪中引起的相位误差。给出了单通道和双通道配置,并比较了它们的测量结果。在双通道配置中不需要衰减器,因为光被后向反射光学元件反射两次,被参考面反射一次,因此强度匹配。在双通道配置中测试角锥棱镜或直角棱镜比在单通道配置中更准确。给出了模拟和实验结果。