Department of New Materials and Biosystems, Max Planck Institute for Metals Research, Stuttgart, Germany.
Nanotechnology. 2010 Oct 22;21(42):425301. doi: 10.1088/0957-4484/21/42/425301. Epub 2010 Sep 22.
Antireflective surfaces composed of biomimetic sub-wavelength structures that employ the 'moth eye principle' for reflectance reduction are highly desirable in many optical applications such as solar cells, photodetectors and laser optics. We report an efficient approach for the fabrication of antireflective surfaces based on a two-step process consisting of gold nanoparticle mask generation by micellar block copolymer nanolithography and a multi-step reactive ion etching process. Depending on the RIE process parameters nanostructured surfaces with tailored antireflective properties can easily be fabricated that show optimum performance for specific applications.
由仿生亚波长结构组成的抗反射表面采用了“ moth eye 原理”来降低反射率,在太阳能电池、光电探测器和激光光学等许多光学应用中都非常理想。我们报告了一种基于两步工艺的高效抗反射表面制造方法,该工艺包括通过胶束嵌段共聚物纳米光刻生成金纳米粒子掩模和多步反应离子刻蚀工艺。根据 RIE 工艺参数,很容易制造出具有定制抗反射性能的纳米结构表面,这些表面在特定应用中表现出最佳性能。