高频（100MHz）超声 PZT 无切缝薄膜线性阵列的新制造方法。
New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array.
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 2013 Apr;60(4):854-7. doi: 10.1109/TUFFC.2013.2635.
Abstract
The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-μm hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.
摘要
本文描述了一种高频无切缝线阵超声换能器的设计、制作和测量，该换能器由水热法制备的锆钛酸铅（PZT）厚膜制成。通过钛基底自分离工艺得到的面积为 1×1cm 的 15μm 水热 PZT 厚膜，采用光刻工艺制作了一个 32 单元、100MHz 的无切缝线阵。无匹配层时的-6dB 带宽、中心频率处的插入损耗和相邻单元之间的串扰分别为 39%、-30dB 和-15dB。
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2
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