Kotura, Inc., 2630 Corporate Place, Monterey Park, California 91754, USA.
Opt Lett. 2010 Oct 1;35(19):3246-8. doi: 10.1364/OL.35.003246.
Fast, compact, and power-efficient silicon microcavity electro-optic modulators are expected to be critical components for chip-level optical interconnects. It is highly desirable that these modulators can be driven by voltage swings of 1 V or less to reduce power dissipation and make them compatible with voltage supply levels associated with current and future complementary metal-oxide-semiconductor technology nodes. Here, we present a silicon racetrack resonator modulator that achieves over 8 dB modulation depth at 12.5 Gbps with a 1 V swing. In addition, the use of a racetrack resonator geometry relaxes the tight lithography resolution requirements typically associated with microring resonators and enhances the ability to use common lithographic optical techniques for their fabrication.
高速、紧凑且节能的硅微腔电光调制器有望成为芯片级光互连的关键组件。这些调制器的驱动电压最好能在 1V 或以下，以降低功耗，并使它们与当前和未来互补金属氧化物半导体技术节点相关的电压供应水平兼容。在这里，我们提出了一种硅环形谐振腔调制器，它在 12.5Gbps 时实现了超过 8dB 的调制深度，且驱动电压为 1V。此外，使用跑道形谐振腔几何形状放宽了通常与微环谐振器相关的严格光刻分辨率要求，并增强了使用常见的光刻光学技术来制造它们的能力。
