Department of Materials and Chemical Engineering, Hanyang University, Ansan, Gyeonggi-do, Republic of Korea.
Nanotechnology. 2010 Nov 5;21(44):445303. doi: 10.1088/0957-4484/21/44/445303. Epub 2010 Oct 8.
Silicon nanowires (NWs) and microwires (MWs) are cost-effectively integrated on a 4-inch wafer using metal-assisted electroless etching for solar cell applications. MWs are periodically positioned using low-level optical patterning in between a dense array of NWs. A spin-on-doping technique is found to be effective for the formation of heavily doped, thin n-type shells of MWs in which the radial doping profile is easily delineated by low voltage scanning electron microscopy. Controlled tapering of the NWs results in additional optical enhancement via optimization of the tradeoff between increased light trapping (by a graded-refractive-index) and increased reflectance (by decreasing areal density of NWs). Compared to single NW (or MW) arrayed cells, the co-integrated solar cells demonstrate improved photovoltaic characteristics, i.e. a short circuit current of 20.59 mA cm(-2) and a cell conversion efficiency of ∼ 7.19% at AM 1.5G illumination.
硅纳米线 (NWs) 和微丝 (MWs) 可通过金属辅助无电电镀在 4 英寸晶圆上实现成本效益集成，适用于太阳能电池应用。MWs 可通过在 NW 密集阵列之间进行低水平光学图案化来周期性地定位。发现旋涂掺杂技术对于形成 MW 的重掺杂薄 n 型壳很有效，其中通过低电压扫描电子显微镜很容易描绘出径向掺杂分布。通过优化增加光捕获（通过渐变折射率）和降低 NW 面积密度（通过降低 NW 面积密度）之间的权衡，控制 NW 的逐渐变细可导致额外的光学增强。与单 NW（或 MW）排列电池相比，共集成的太阳能电池表现出改进的光伏特性，例如在 AM 1.5G 照明下短路电流为 20.59 mA cm(-2)，电池转换效率约为 7.19%。
