Ion-beam-deposited boron carbide coatings for the extreme ultraviolet.
作者信息
Blumenstock G M, Keski-Kuha R A
出版信息
Appl Opt. 1994 Sep 1;33(25):5962-3. doi: 10.1364/AO.33.005962.
PMID:20936006
Abstract
The normal-incidence reflectance of ion-beam-deposited boron carbide thin films has been evaluated in the extreme ultraviolet (EUV) spectral region. High-reflectance coatings have been produced with reflectances greater than 30% between 67 and 121.6 nm. This high reflectance makes ion-beam-deposited boron carbide an attractive coating for EUV applications.
摘要
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