Institute of Materials Physics and Center for Nanotechnology, University of Muenster, Muenster 48149, Germany.
Chem Soc Rev. 2011 Mar;40(3):1247-58. doi: 10.1039/b924854b. Epub 2010 Oct 28.
Surface nano-patterns on substrates are the fundamental structures of various nano-devices. Template-based surface nano-patterning techniques are highly efficient methods in realizing different surface nano-patterns. The time-saving and low-cost fabrication processes of the template-based surface patterning are highly desirable for industry in fabricating different kinds of nano-devices. This tutorial review summarizes the recent advancements in the field of template-based surface nano-patterning, especially focusing on three templates prepared using self-assembly processes: ultra-thin alumina membranes, monolayer polystyrene sphere arrays, and block copolymer patterns. The basic concepts, the general fabrication processes, the structure-related properties, and the device applications of these template-based surface nano-patterning techniques are introduced.
基底表面的纳米图案是各种纳米器件的基本结构。基于模板的表面纳米图案化技术是实现不同表面纳米图案的高效方法。基于模板的表面图案化的省时和低成本制造工艺对于制造各种纳米器件的工业是非常理想的。本教程综述总结了基于模板的表面纳米图案化领域的最新进展，特别是重点介绍了三种使用自组装工艺制备的模板：超薄氧化铝膜、单层聚苯乙烯球阵列和嵌段共聚物图案。介绍了这些基于模板的表面纳米图案化技术的基本概念、一般制造工艺、结构相关特性和器件应用。
