具有亚 50nm 空间分辨率的一维沃尔兹光学

One-dimensional Wolter optics with a sub-50 nm spatial resolution.

机构信息

Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

出版信息

Opt Lett. 2010 Nov 1;35(21):3583-5. doi: 10.1364/OL.35.003583.

DOI:10.1364/OL.35.003583

PMID:21042357

Abstract

We studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror [i.e., one-dimensional (1D) Wolter optics] to realize an achromatic full-field hard x-ray microscopy with a resolution better than 50 nm. We report the performance of this 1D Wolter optical system when the mirrors were ultraprecisely figured by elastic emission machining. Experiments to form a demagnified image (demagnification factor of 385) of a 10 μm slit were conducted at an x-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with a resolution better than 50 nm over a 12.1 μm field.

摘要

我们研究了一种由椭圆反射镜和双曲反射镜（即一维沃尔光学）组成的成像系统，以实现具有优于 50nm 分辨率的消色差全场硬 X 射线显微镜。我们报告了当镜子通过弹性发射加工超精密加工时，这种一维沃尔光学系统的性能。在 SPring-8 的 BL29XUL 处，在 11.5keV 的 X 射线能量下进行了形成 10μm 狭缝的缩小图像（缩小倍率 385）的实验。该系统可以在 12.1μm 的视场中形成优于 50nm 分辨率的缩小图像。