基于全反射镜的消色差高分辨率全场X射线显微镜。

Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors.

作者信息

Matsuyama Satoshi, Emi Yoji, Kino Hidetoshi, Kohmura Yoshiki, Yabashi Makina, Ishikawa Tetsuya, Yamauchi Kazuto

出版信息

Opt Express. 2015 Apr 20;23(8):9746-52. doi: 10.1364/OE.23.009746.

DOI:10.1364/OE.23.009746

Abstract

We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with ~100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV.

摘要

我们基于先进的柯克帕特里克-贝兹镜光学系统开发了一种消色差高分辨率全场X射线显微镜，该系统由两对利用X射线全反射的椭圆镜和双曲线镜组成。在SPring-8进行了研究空间分辨率和色差的性能测试。该显微镜清晰地分辨出了特征尺寸约为100纳米的图案。通过改变X射线能量对图案进行成像，发现在8-11 keV的宽能量范围内具有消色差特性。