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用于光学测试的合成相移:无需零位光学元件或相移器的点衍射干涉测量法。

Synthetic phase-shifting for optical testing: point-diffraction interferometry without null optics or phase shifters.

作者信息

Park Ryeojin, Kim Dae Wook, Barrett Harrison H

出版信息

Opt Express. 2013 Nov 4;21(22):26398-417. doi: 10.1364/OE.21.026398.

Abstract

An innovative iterative search method called the synthetic phase-shifting (SPS) algorithm is proposed. This search algorithm is used for maximum-likelihood (ML) estimation of a wavefront that is described by a finite set of Zernike Fringe polynomials. In this paper, we estimate the coefficient, or parameter, values of the wavefront using a single interferogram obtained from a point-diffraction interferometer (PDI). In order to find the estimates, we first calculate the squared-difference between the measured and simulated interferograms. Under certain assumptions, this squared-difference image can be treated as an interferogram showing the phase difference between the true wavefront deviation and simulated wavefront deviation. The wavefront deviation is the difference between the reference and the test wavefronts. We calculate the phase difference using a traditional phase-shifting technique without physical phase-shifters. We present a detailed forward model for the PDI interferogram, including the effect of the finite size of a detector pixel. The algorithm was validated with computational studies and its performance and constraints are discussed. A prototype PDI was built and the algorithm was also experimentally validated. A large wavefront deviation was successfully estimated without using null optics or physical phase-shifters. The experimental result shows that the proposed algorithm has great potential to provide an accurate tool for non-null testing.

摘要

提出了一种名为合成相移(SPS)算法的创新迭代搜索方法。该搜索算法用于对由一组有限的泽尼克条纹多项式描述的波前进行最大似然(ML)估计。在本文中,我们使用从点衍射干涉仪(PDI)获得的单个干涉图来估计波前的系数或参数值。为了找到估计值,我们首先计算测量干涉图与模拟干涉图之间的平方差。在某些假设下,该平方差图像可被视为显示真实波前偏差与模拟波前偏差之间相位差的干涉图。波前偏差是参考波前与测试波前之间的差值。我们使用无物理相移器的传统相移技术来计算相位差。我们给出了PDI干涉图的详细前向模型,包括探测器像素有限尺寸的影响。该算法通过计算研究进行了验证,并讨论了其性能和局限性。构建了一个PDI原型,该算法也通过实验进行了验证。在不使用零位光学元件或物理相移器的情况下成功估计了大波前偏差。实验结果表明,所提出的算法具有为非零位测试提供精确工具的巨大潜力。

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Sub-Nyquist interferometry.亚奈奎斯特干涉测量法
Appl Opt. 1987 Dec 15;26(24):5245-58. doi: 10.1364/AO.26.005245.
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Polarization phase-shifting point-diffraction interferometer.偏振相移点衍射干涉仪
Appl Opt. 2006 May 20;45(15):3463-76. doi: 10.1364/ao.45.003463.

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