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Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to benzocyclobutene films.

作者信息

Guo S, Gustafsson G, Hagel O J, Arwin H

出版信息

Appl Opt. 1996 Apr 1;35(10):1693-9. doi: 10.1364/AO.35.001693.

DOI:10.1364/AO.35.001693
PMID:21085291
Abstract

An analysis procedure for evaluating the refractive index and the thickness of 5-10-µm-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in ψ and Δ with respect to the refractive index and the thickness of the films are also discussed.

摘要

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