Guo S, Gustafsson G, Hagel O J, Arwin H
Appl Opt. 1996 Apr 1;35(10):1693-9. doi: 10.1364/AO.35.001693.
An analysis procedure for evaluating the refractive index and the thickness of 5-10-µm-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in ψ and Δ with respect to the refractive index and the thickness of the films are also discussed.