CMOS/microfluidic Lab-on-chip for cells-based diagnostic tools.

We describe in this paper cells sensing and manipulation methods, as well as platforms based on Lab-on-chip devices. Among other contributions, new circuit and microfluidic techniques, and packaging methods are proposed for efficient cells manipulation and detection. The proposed devices include high-sensitivity sensing circuits (200 mV/fF), low-pressure liquid injection interfaces (< 0.65 psi), low-voltage manipulation signals, direct-write microfluidic fabrication technique on top of CMOS based capacitive sensors. In addition, several types of electrode arrays (square and L-shaped) are used for the manipulation of various types of cells and particles.