Skinner C H, Schwob J L
Appl Opt. 1996 Aug 1;35(22):4321-4. doi: 10.1364/AO.35.004321.
We describe calculations of the sensitivity of CCD's to soft x rays incident at grazing angles. Soft-x-ray spectrometers based on a Rowland-circle geometry have a focal plane and hence detector surface at grazing incidence to the soft × rays. We model the penetration of the grazing-incidence soft × rays to the sensitive region of the CCD and predict the charge-collection efficiency as a function of wavelength. The results show significant advantages over microchannel plate intensified detection.
