Poletto L, Boscolo A, Tondello G
Department of Electronics and Informatics, University of Padova, Istituto Nazionale per la Fisica della Materia, via Gradenigo, 6yA-35131 Padova, Italy.
Appl Opt. 1999 Jan 1;38(1):29-36. doi: 10.1364/ao.38.000029.
The performances of a CCD detector have been evaluated in a wide spectral region, which ranges from the near IR to the soft x ray. Four different experimental setups have been used: a Czerny-Turner monochromator for the 1100-250-nm region, a normal-incidence Johnson-Onaka monochromator for the 250-30-nm region, a grazing-incidence Rowland monochromator for the 30-0.27-nm region, and a test facility with broadband filters for the 0.27-0.14-nm region. The CCD is thinned and backilluminated, with a 512 x 512 format and 24 microm x 24 microm pixels. The quantum efficiency was measured in the 1100-0.14-nm (1-eV to 9-keV) region, and the uniformity of response was in the 1100-58-nm (1-21-eV) region. Contamination effects in the vacuum UV range are also discussed.
