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动态生成德拜衍射极限多焦点阵列用于直接激光打印纳米制造。

Dynamic generation of Debye diffraction-limited multifocal arrays for direct laser printing nanofabrication.

机构信息

Centre for Micro-Photonics and CUDOS, Faculty of Engineering and Industrial Sciences, Swinburne University of Technology, Hawthorn, Victoria, Australia.

出版信息

Opt Lett. 2011 Feb 1;36(3):406-8. doi: 10.1364/OL.36.000406.

DOI:10.1364/OL.36.000406
PMID:21283205
Abstract

We propose a Debye-theory-based iterative method to produce accurate phase patterns for generating highly uniform diffraction-limited multifocal arrays with a high-NA objective. It is shown that by using the Debye method, the uniformity of the diffraction-limited focal arrays can reach 99%, owing to the critical consideration of the depolarization effect associated with high-NA objectives. The generated phase patterns are implemented in fast dynamic laser printing nanofabrication for the generation of individually controlled high-quality microvoid arrays in a solid polymer material by a single exposure of a femtosecond laser beam. As a result of the high-quality multifocal arrays, functional three-dimensional photonic crystals possessing multiple stopgaps with suppression up to 80% in transmission spectra are demonstrated.

摘要

我们提出了一种基于德拜理论的迭代方法,用于生成具有高数值孔径物镜的高度均匀的衍射极限多焦点阵列的精确相位图案。结果表明,通过使用德拜方法,可以考虑与高数值孔径物镜相关的去偏振效应的临界情况,使衍射极限焦点阵列的均匀性达到 99%。生成的相位图案通过快速动态激光打印纳米制造来实现,通过单次曝光飞秒激光束在固体聚合物材料中产生单独控制的高质量微空洞阵列。由于高质量的多焦点阵列,展示了具有多个截止的功能三维光子晶体,在传输光谱中抑制高达 80%。

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