Evolution of structure, phase composition, and x-ray reflectivity of multilayer mirrors mo-(B + C) after annealing at 250-1100°c.

Structural, phase, and chemical stabilities of x-ray multilayer mirrors Mo-(B + C) with periods in the range 8-11.5 nm were studied at temperatures of 250-1100°C by small-angle and large-angle x-ray diffraction and electron microscopy methods. Two amorphizations at ~450 and ~750°C and two crystallizations at ~650 and ~850°C of Mo-based layers were observed, which were due to the formation of the molybdenum carbides MoC (hex), γ-MoC, and Mo2C instead of the metal Mo, and to the formation of the molybdenum borides MoB2 and Mo2B5 instead of molybdenum carbides, respectively. Both amorphizations of Mo-based layers were accompanied by smoothing of interfaces and by an increase of the multilayer x-ray reflectivity at λ = 0.154 nm. Both crystallizations of Mo-based layers promoted the development of interface roughness and a decrease of multilayer x-ray reflectivity. The destruction of Mo-(B + C) multilayers at ~ 1100°C was caused by the recrystallization of Mo2B5 layers.