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一种用于流体分析的集成微流控芯片,带有40兆赫兹无铅换能器。

An integrated microfluidic chip with 40 MHz lead-free transducer for fluid analysis.

作者信息

Lee S T F, Lam K H, Lei L, Zhang X M, Chan H L W

机构信息

Department of Applied Physics, The Hong Kong Polytechnic University, Kowloon, Hong Kong.

出版信息

Rev Sci Instrum. 2011 Feb;82(2):024903. doi: 10.1063/1.3553575.

DOI:10.1063/1.3553575
PMID:21361626
Abstract

The design, fabrication, and evaluation of a high-frequency transducer made from lead-free piezoceramic for the application of microfluidic analysis is described. Barium strontium zirconate titanate [(Ba(0.95)Sr(0.05))(Zr(0.05)Ti(0.95))O(3), abbreviated as BSZT] ceramic has been chosen to be the active element of the transducer. The center frequency and bandwidth of this high-frequency ultrasound transducer have been measured to be 43 MHz and 56.1%, respectively. The transducer was integrated into a microfluidic channel and used to measure the sound velocity and attenuation of the liquid flowing in the channel. Results suggest that lead-free high-frequency transducers could be used for in situ analysis of property of the fluid flowing through the microfluidic system.

摘要

本文描述了一种用于微流控分析的由无铅压电陶瓷制成的高频换能器的设计、制造及评估。锆钛酸钡锶[(Ba(0.95)Sr(0.05))(Zr(0.05)Ti(0.95))O(3),简称为BSZT]陶瓷被选作换能器的活性元件。该高频超声换能器的中心频率和带宽经测量分别为43 MHz和56.1%。该换能器被集成到一个微流控通道中,并用于测量通道内流动液体的声速和衰减。结果表明,无铅高频换能器可用于原位分析流经微流控系统的流体的性质。

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