DTU Nanotech-Department of Micro- and Nanotechnology, Technical University of Denmark, 2800 Lyngby, Denmark.
Nano Lett. 2011 Apr 13;11(4):1568-74. doi: 10.1021/nl104384b. Epub 2011 Mar 29.
A new and versatile technique for the wafer scale nanofabrication of silicon nanowire (SiNW) and multiwalled carbon nanotube (MWNT) tips on atomic force microscope (AFM) probes is presented. Catalyst material for the SiNW and MWNT growth was deposited on prefabricated AFM probes using aligned wafer scale nanostencil lithography. Individual vertical SiNWs were grown epitaxially by a catalytic vapor-liquid-solid (VLS) process and MWNTs were grown by a plasma-enhanced chemical vapor (PECVD) process on the AFM probes. The AFM probes were tested for imaging micrometers-deep trenches, where they demonstrated a significantly better performance than commercial high aspect ratio tips. Our method demonstrates a reliable and cost-efficient route toward wafer scale manufacturing of SiNW and MWNT AFM probes.
提出了一种新的、通用的技术，用于在原子力显微镜（AFM）探针上进行晶圆级的硅纳米线（SiNW）和多壁碳纳米管（MWNT）尖端的纳米制造。使用对准的晶圆级纳米模板光刻法，将用于 SiNW 和 MWNT 生长的催化剂材料沉积在预制的 AFM 探针上。通过催化气相-液相-固相（VLS）工艺在 AFM 探针上外延生长单个垂直 SiNW，通过等离子体增强化学气相沉积（PECVD）工艺在 AFM 探针上生长 MWNTs。对 AFM 探针进行了成像微深沟槽的测试，结果表明其性能明显优于商业高纵横比探针。我们的方法为晶圆级制造 SiNW 和 MWNT AFM 探针提供了一种可靠且经济高效的途径。
