Center for Nanoscale Science & Technology, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA.
Nanoscale. 2011 Jul;3(7):2679-88. doi: 10.1039/c1nr10046g. Epub 2011 Apr 12.
Semiconductor chip manufacturing is by far the predominant nanomanufacturing technology in the world today. Top-down lithography techniques are used for fabrication of logic and memory chips since, in order to function, these chips must essentially be perfect. Assuring perfection requires expensive metrology. Top of the line logic sells for several hundred thousand dollars per square metre and, even though the required metrology is expensive, it is a small percentage of the overall manufacturing cost. The level of stability and control afforded by current lithography tools means that much of this metrology can be online and statistical. In contrast, many of the novel types of nanomanufacturing currently being developed will produce products worth only a few dollars per square metre. To be cost effective, the required metrology must cost proportionately less. Fortunately many of these nanofabrication techniques, such as block copolymer self-assembly, colloidal self-assembly, DNA origami, roll-2-roll nano-imprint, etc., will not require the same level of perfection to meet specification. Given the variability of these self-assembly processes, in order to maintain process control, these techniques will require some level of real time online metrology. Hence we are led to the conclusion that future nanomanufacturing may well necessitate "cheap" nanometre scale metrology which functions real time and on-line, e.g. at GHz rates, in the production stream. In this paper we review top-down and bottom-up nanofabrication techniques and compare and contrast the various metrology requirements.
半导体芯片制造是当今世界上占主导地位的纳米制造技术。由于逻辑和存储芯片要实现其功能，就必须基本达到完美，因此采用自上而下的光刻技术来制造这些芯片。要确保完美，就需要昂贵的计量技术。顶级逻辑芯片的售价为每平方米数十万美元，尽管所需的计量技术很昂贵，但它只占整体制造成本的一小部分。当前光刻工具所提供的稳定性和控制水平意味着，大部分计量技术都可以实现在线和统计性的测量。相比之下，目前正在开发的许多新型纳米制造技术所生产的产品每平方米的价值仅为数美元。要具有成本效益，所需的计量技术就必须相应地降低成本。幸运的是，许多这些纳米制造技术，如嵌段共聚物自组装、胶体自组装、DNA 折纸术、辊对辊纳米压印等，不需要达到同样的完美程度就可以满足规格要求。考虑到这些自组装工艺的可变性，为了保持过程控制，这些技术将需要某种程度的实时在线计量技术。因此，我们得出结论，未来的纳米制造可能需要“廉价”的纳米级计量技术，这种技术可以实时在线运行，例如在生产线上以 GHz 的速率运行。在本文中，我们回顾了自上而下和自下而上的纳米制造技术，并比较和对比了各种计量技术的要求。
