Yu Anguang, Liu Heping, Blinco James P, Jack Kevin S, Leeson Michael, Younkin Todd R, Whittaker Andrew K, Blakey Idriss
The University of Queensland, Australian Institute for Bioengineering & Nanotechnology and Centre for Advanced Imaging, Queensland, 4072 Australia.
Macromol Rapid Commun. 2010 Aug 17;31(16):1449-55. doi: 10.1002/marc.201000117. Epub 2010 Jun 30.
A series of high-performance polycarbonates have been prepared with glass-transition temperatures and decomposition temperatures that are tunable by varying the repeat-unit chemical structure. Patterning of the polymers with extreme UV lithography has been achieved by taking advantage of direct photoinduced chain scission of the polymer chains, which results in a molecular-weight based solubility switch. After selective development of the irradiated regions of the polymers, feature sizes as small as 28.6 nm have been printed and the importance of resist-developer interactions for maximizing image quality has been demonstrated.
