Berger Rüdiger, Butt Hans-Jürgen, Retschke Maria B, Weber Stefan A L
Max Planck Institute for Polymer Research, 55128 Mainz, Germany.
Macromol Rapid Commun. 2009 Jul 16;30(14):1167-78. doi: 10.1002/marc.200900220. Epub 2009 Jul 7.
Scanning probe microscopy methods allow the investigation of a variety of sample surface properties on a nanometer scale, even down to single molecules. As molecular electronics advance, the characterization of electrical properties becomes more and more important. In both research and industry, films made from composite materials and lithographically structured elements have already reached structure sizes down to a few nanometers. Here, we review the major scanning probe microscopy modes that are used for electrical characterization of thin films, that is, scanning conductive force microscopy, Kelvin probe force microscopy and scanning electric field microscopy. To demonstrate the possibilities and capabilities of these modes, reference samples were fabricated by means of focused ion beam deposition and analyzed using the described methods. Furthermore, two upcoming modes are presented that are based on: i) local current measurements while the SPM-cantilever is excited into torsional vibrations, and, ii) changes in a backscattered microwave that was coupled into a scanning probe microscopy-cantilever. The scanning-probe-based electrical modes are applicable for studies of functional layers used in soft matter electronic devices under realistic environmental conditions.
扫描探针显微镜方法能够在纳米尺度上研究各种样品表面特性，甚至能深入到单个分子层面。随着分子电子学的发展，电性能表征变得越来越重要。在研究和工业领域，由复合材料制成的薄膜以及光刻结构化元件的结构尺寸已达到几纳米。在此，我们回顾用于薄膜电学表征的主要扫描探针显微镜模式，即扫描导电力显微镜、开尔文探针力显微镜和扫描电场显微镜。为了展示这些模式的可能性和能力，通过聚焦离子束沉积制备了参考样品，并使用所述方法进行分析。此外，还介绍了两种即将出现的模式，它们基于：i）当扫描探针显微镜悬臂被激发到扭转振动时进行局部电流测量，以及ii）耦合到扫描探针显微镜悬臂中的背向散射微波的变化。基于扫描探针的电学模式适用于在实际环境条件下对软物质电子器件中使用的功能层进行研究。
