Leem Jung Woo, Yu Jae Su
Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, Giheung-gu, Yongin-si, Gyeonggi-do 446-701, Korea.
Opt Express. 2011 May 9;19 Suppl 3:A258-68. doi: 10.1364/OE.19.00A258.
Indium tin oxide (ITO) thin films with relatively high transparency and low absorption are prepared by glancing angle deposition (GLAD) method and their effect on the device performance of a-Si:H/μc-Si:H tandem thin film solar cells is theoretically investigated by applying the experimentally measured physical data of the fabricated films to the simulation parameters. The GLAD of ITO produces inclined porous columnar nanostructures due to the atomic shadowing effect. With increasing the incident flux angle, the columns are increasingly inclined, thus resulting in the improved transmission property as well as the decrease of the refractive index and extinction coefficient because of enhanced porosity within the film. Furthermore, the antireflection characteristics are improved over a wide wavelength range of 300-1100 nm. For a-Si:H/μc-Si:H tandem thin film solar cell structure incorporated with the 0° ITO/80° ITO bi-layer structure, the conversion efficiency (η) of 13.6% is obtained from simulation under AM1.5g illumination, indicating an efficiency improvement compared to the device with the 0° ITO/0° ITO bi-layer structure (i.e. η = 12.58%).
采用掠角沉积（GLAD）法制备了具有较高透明度和低吸收率的氧化铟锡（ITO）薄膜，并通过将制备薄膜的实验测量物理数据应用于模拟参数，从理论上研究了其对非晶硅/微晶硅叠层薄膜太阳能电池器件性能的影响。由于原子阴影效应，ITO的掠角沉积产生倾斜的多孔柱状纳米结构。随着入射通量角的增加，柱体倾斜度越来越大，从而导致透射性能提高，同时由于薄膜内孔隙率增加，折射率和消光系数降低。此外，在300-1100nm的宽波长范围内，抗反射特性得到改善。对于采用0°ITO/80°ITO双层结构的非晶硅/微晶硅叠层薄膜太阳能电池结构，在AM1.5g光照下模拟得到的转换效率（η）为13.6%，表明与采用0°ITO/0°ITO双层结构的器件相比效率有所提高（即η = 12.58%）。
