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用于显微镜检查的具有第二波长辅助的微偏轴干涉测量法。

Slightly off-axis interferometry for microscopy with second wavelength assistance.

作者信息

Han Junhe, Gao Peng, Yao Baoli, Gu Yuzong, Huang Mingju

机构信息

School of Physics and Electronics, Henan University, Kaifeng 475004, China.

出版信息

Appl Opt. 2011 Jun 10;50(17):2793-8. doi: 10.1364/AO.50.002793.

Abstract

Slightly off-axis interferometry for microscopy has been performed, where the dc term of the interferogram is suppressed by the object wave in another wavelength. One wavelength of the laser beam (red light) is used to generate the slightly off-axis interferogram, while the second wavelength (blue light) is employed to measure the transmittance of the specimen. Both the red light and blue light are recorded simultaneously by a color CCD camera and can be separated without cross talk via the red-green-blue components. The dc term of the slightly off-axis interferogram of red light is suppressed with the object wave of blue light. As a consequence, the requirement on the off-axis angle between the object and reference waves is relaxed as well as the requirement on the resolving power of CCD camera.

摘要

已经开展了用于显微镜的微离轴干涉测量,其中干涉图的直流项由另一波长的物波抑制。激光束的一个波长(红光)用于生成微离轴干涉图,而第二个波长(蓝光)用于测量样品的透过率。红光和蓝光由彩色电荷耦合器件相机同时记录,并且可以通过红-绿-蓝分量无串扰地分离。红光微离轴干涉图的直流项由蓝光的物波抑制。因此,对物波与参考波之间离轴角的要求以及对电荷耦合器件相机分辨能力的要求都有所放宽。

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