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通过控制晶体结构来制造可靠的半导体纳米线。

Fabrication of reliable semiconductor nanowires by controlling crystalline structure.

机构信息

Department of Physics, Kyonggi University, Suwon, Gyeonggi-Do, Republic of Korea.

出版信息

Nanotechnology. 2011 Jul 29;22(30):305704. doi: 10.1088/0957-4484/22/30/305704. Epub 2011 Jun 28.

Abstract

One-dimensional SnO(2) nanomaterials with wide bandgap characteristics are attractive for flexible and/or transparent displays and high-performance nano-electronics. In this study, the crystallinity of SnO(2) nanowires was regulated by controlling their growth temperatures. Moreover, the correlation of the crystallinity of nanowires with optical and electrical characteristics was analyzed. When SnO(2) nanowires were grown at temperatures below 900 °C, they showed various growth directions and abnormal discontinuity in their crystal structures. On the other hand, most nanowires grown at 950 °C exhibited a regular growth trend in the direction of [100]. In addition, the low temperature photoluminescence measurement revealed that the higher growth temperatures of nanowires gradually decreased the 500 nm peak rather than the 620 nm peak. The former peak is derived from the surface defect related to the shallow energy level and affects nanowire surface states. Owing to crystallinity and defects, the threshold voltage range (maximum-minimum) of SnO(2) nanowire transistors was 1.5 V at 850 °C, 1.1 V at 900 °C, and 0.5 V at 950 °C, with dispersion characteristics dramatically decreased. This study successfully demonstrated the effects of nanowire crystallinity on optical and electrical characteristics. It also suggested that the optical and electrical characteristics of nanowire transistors could be regulated by controlling their growth temperatures in the course of producing SnO(2) nanowires.

摘要

一维 SnO(2)纳米材料具有宽带隙特性,在柔性和/或透明显示器以及高性能纳米电子学领域具有吸引力。在这项研究中,通过控制生长温度来调节 SnO(2)纳米线的结晶度。此外,还分析了纳米线的结晶度与光学和电学特性的相关性。当 SnO(2)纳米线在低于 900°C 的温度下生长时,它们表现出各种不同的生长方向和晶体结构的异常不连续性。另一方面,在 950°C 下生长的大多数纳米线表现出沿[100]方向的规则生长趋势。此外,低温光致发光测量表明,纳米线的较高生长温度逐渐降低了 500nm 峰而不是 620nm 峰。前者峰源于与浅能级相关的表面缺陷,会影响纳米线表面状态。由于结晶度和缺陷,SnO(2)纳米线晶体管的阈值电压范围(最大值-最小值)在 850°C 时为 1.5V,在 900°C 时为 1.1V,在 950°C 时为 0.5V,分散特性显著降低。本研究成功地证明了纳米线结晶度对光学和电学特性的影响。它还表明,通过在生产 SnO(2)纳米线的过程中控制其生长温度,可以调节纳米线晶体管的光学和电学特性。

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