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采用湿化学方法制备的微图案化硫化铜(Cu(x)S)薄膜的扫描电化学显微镜研究。

Scanning electrochemical microscopy studies of micropatterned copper sulfide (Cu(x)S) thin films fabricated by a wet chemistry method.

作者信息

Chen Miao, Zhao Jing, Zhao Xiaocui

机构信息

CSIRO Minerals, Clayton, Victoria, 3168, Australia.

出版信息

Electrochim Acta. 2011 May 30;56(14-7):5016-5021. doi: 10.1016/j.electacta.2011.03.100.

Abstract

Patterned copper sulfide (Cu(x)S) microstructures on Si (1 1 1) wafers were successfully fabricated by a relatively simple solution growth method using copper sulfate, ethylenediaminetetraacetate and sodium thiosulfate aqueous solutions as precursors. The Cu(x)S particles were selectively deposited on a patterned self-assembled monolayer of 3-aminopropyltriethoxysilane regions created by photolithography. To obtain high quality Cu(x)S films, preparative conditions such as concentration, proportion, pH and temperature of the precursor solutions were optimized. Various techniques such as optical microscopy, atomic force microscopy (AFM), X-ray diffraction, optical absorption and scanning electrochemical microscopy (SECM) were employed to examine the topography and properties of the micro-patterned Cu(x)S films. Optical microscopy and AFM results indicated that the Cu(x)S micro-pattern possessed high selectivity and clear edge resolution. From combined X-ray diffraction analysis and optical band gap calculations we conclude that Cu(9)S(5) (digenite) was the main phase within the resultant Cu(x)S film. Both SECM image and cyclic voltammograms confirmed that the Cu(x)S film had good electrical conductivity. Moreover, from SECM approach curve analysis, the apparent electron-transfer rate constant (k) in the micro-pattern of Cu(x)S dominated surface was estimated as 0.04 cm/s. The SECM current map showed high edge acuity of the micro-patterned Cu(x)S.

摘要

通过一种相对简单的溶液生长方法,以硫酸铜、乙二胺四乙酸和硫代硫酸钠水溶液作为前驱体,成功在硅(1 1 1)晶片上制备出了图案化的硫化铜(Cu(x)S)微结构。Cu(x)S颗粒选择性地沉积在通过光刻法制备的3-氨丙基三乙氧基硅烷区域的图案化自组装单分子层上。为了获得高质量的Cu(x)S薄膜,对前驱体溶液的浓度、比例、pH值和温度等制备条件进行了优化。采用了多种技术,如光学显微镜、原子力显微镜(AFM)、X射线衍射、光吸收和扫描电化学显微镜(SECM)来研究微图案化Cu(x)S薄膜的形貌和性能。光学显微镜和AFM结果表明,Cu(x)S微图案具有高选择性和清晰的边缘分辨率。通过结合X射线衍射分析和光学带隙计算,我们得出结论,所得Cu(x)S薄膜中的主要相为Cu(9)S(5)(辉铜矿)。SECM图像和循环伏安图均证实Cu(x)S薄膜具有良好的导电性。此外,通过SECM逼近曲线分析,估计Cu(x)S主导表面微图案中的表观电子转移速率常数(k)为0.04 cm/s。SECM电流图显示微图案化Cu(x)S具有高边缘锐度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5d92/3112495/f95f2e1341e6/gr1.jpg

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