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用纳米探针写入的超高 Q 值纳米腔。

Ultrahigh-Q nanocavities written with a nanoprobe.

机构信息

NTT Basic Research Laboratories, NTT Corporation, 3-1, Morinosato-Wakamiya Atsugi, Kanagawa 243-0198, Japan.

出版信息

Nano Lett. 2011 Sep 14;11(9):3634-42. doi: 10.1021/nl201449m. Epub 2011 Aug 1.

DOI:10.1021/nl201449m
PMID:21806036
Abstract

High-Q nanocavities have been extensively studied recently because they are considered key elements in low-power photonic devices and integrated circuits. Here we demonstrate that ultrahigh-Q (>10(6)) nanocavities can be created by employing scanning probe lithography on a prepatterned line defect in a silicon photonic crystal. This is the first realization of ultrahigh-Q nanocavities by the postprocess modification of photonic crystals. With this method, we can form an ultrahigh-Q nanocavity with controllable cavity parameters at an arbitrary position along a line defect. Furthermore, the fabricated nanocavity achieves ultralow power all-optical bistable operation owing to its large cavity enhancement effect. This demonstration indicates the possibility of realizing photonic integrated circuits on demand, where various circuit patterns are written with a nanoprobe on a universal photonic crystal substrate.

摘要

高 Q 值纳米腔最近得到了广泛研究,因为它们被认为是低功耗光子器件和集成电路的关键元件。在这里,我们通过在硅光子晶体中的预图案线缺陷上使用扫描探针光刻来演示可以创建超高 Q 值(>10^6)纳米腔。这是通过光子晶体的后处理修饰首次实现超高 Q 值纳米腔。通过这种方法,我们可以在沿线缺陷的任意位置形成具有可控腔参数的超高 Q 值纳米腔。此外,由于其大的腔增强效应,所制造的纳米腔实现了超低功率全光双稳操作。该演示表明了在需求上实现光子集成电路的可能性,其中各种电路图案可以用纳米探针在通用光子晶体衬底上写入。

相似文献

1
Ultrahigh-Q nanocavities written with a nanoprobe.用纳米探针写入的超高 Q 值纳米腔。
Nano Lett. 2011 Sep 14;11(9):3634-42. doi: 10.1021/nl201449m. Epub 2011 Aug 1.
2
Nonlinear and adiabatic control of high-Q photonic crystal nanocavities.高品质因子光子晶体纳米腔的非线性与绝热控制
Opt Express. 2007 Dec 24;15(26):17458-81. doi: 10.1364/oe.15.017458.
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On-demand transfer of trapped photons on a chip.芯片上的囚禁光子按需转移。
Sci Adv. 2016 May 20;2(5):e1501690. doi: 10.1126/sciadv.1501690. eCollection 2016 May.
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Ultrafast spontaneous emission of copper-doped silicon enhanced by an optical nanocavity.光学纳米腔增强铜掺杂硅的超快自发发射
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Glass-embedded two-dimensional silicon photonic crystal devices with a broad bandwidth waveguide and a high quality nanocavity.具有宽带宽波导和高品质纳米腔的玻璃嵌入式二维硅光子晶体器件。
Opt Express. 2010 Aug 30;18(18):19361-6. doi: 10.1364/OE.18.019361.
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Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity.具有横向p-i-n嵌入式光子晶体纳米腔的低功耗快速电光硅调制器。
Opt Express. 2009 Dec 7;17(25):22505-13. doi: 10.1364/OE.17.022505.
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Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration.适用于集成的高Q值光子异质结构纳米腔的设计与演示
Opt Express. 2009 Sep 28;17(20):18093-102. doi: 10.1364/OE.17.018093.
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Opt Express. 2011 Jun 20;19(13):12480-9. doi: 10.1364/OE.19.012480.
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引用本文的文献

1
Movable high-Q nanoresonators realized by semiconductor nanowires on a Si photonic crystal platform.基于硅光子晶体平台的半导体纳米线实现的可移动高 Q 值纳米谐振器。
Nat Mater. 2014 Mar;13(3):279-85. doi: 10.1038/nmat3873.
2
Reconfigurable, defect-free, ultrahigh-Q photonic crystal microcavities for sensing.可重构、无缺陷、超高 Q 值光子晶体微腔用于传感。
Sensors (Basel). 2013 Mar 8;13(3):3262-9. doi: 10.3390/s130303262.