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具有金纳米颗粒吸附的高灵敏度氧化锌纳米线一氧化碳传感器。

Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles.

作者信息

Chang Shoou-Jinn, Hsueh Ting-Jen, Chen I-Cherng, Huang Bohr-Ran

机构信息

Institute of Microelectronics and Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 70101, Taiwan.

出版信息

Nanotechnology. 2008 Apr 30;19(17):175502. doi: 10.1088/0957-4484/19/17/175502. Epub 2008 Mar 25.

Abstract

In this study, the growth of high density single-crystalline ZnO nanowires on patterned ZnO:Ga/SiO(2)/Si templates was reported. We also adsorbed Au nanoparticles onto nanowire surfaces and fabricated ZnO nanowire CO sensors. With 50 ppm CO gas, it was found that we could enhance the device sensitivities at 350 °C from 4.2% to 46.5% by the adsorption of Au nanoparticles. It was also found that measured sensitivities were around 30%, 37%, 46.5% and 53% when concentration of the injected CO gas was 5, 20, 50 and 100 ppm, respectively.

摘要

在本研究中,报道了在图案化的ZnO:Ga/SiO₂/Si模板上生长高密度单晶ZnO纳米线。我们还将金纳米颗粒吸附到纳米线表面,并制造了ZnO纳米线CO传感器。对于50 ppm的CO气体,发现通过吸附金纳米颗粒,我们可以将350°C时的器件灵敏度从4.2%提高到46.5%。还发现,当注入的CO气体浓度分别为5、20、50和100 ppm时,测量的灵敏度分别约为30%、37%、46.5%和53%。

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